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Binary Group-15 Compounds: New Precursors for Semiconductors
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The innovative technology provides binary precursors, which keep all advantages of the known precursors TBAs and TBP, but deliver two group-15 el-ements in a defined molar ratio in one chemical component (one-component precursors). Any pairs of group-15 elements (N, P, As, Sb and Bi) may be combined in these components.
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