Feldgeführter planarer Präzisionsantrieb mit einem luftgeführten Läufer
Ein feldgeführter planarer Präzisionsmotor mit luftgelagertem Läufer ist
mit verkürzten planaren Antriebsspulen ausgestattet, die zwecks
energieminimierter Erweiterung des Verfahrbereiches in ihren X- und Y-
Koordinaten jeweils präzisionslineargeführt und bewegt werden und der
Bewegung des Hauptläufers synchron folgen.
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